Semiconductor furnace tube High temperature furnace tube Quartz epitaxial bell jar
Product Description
Product Description
Quartz tube for CVD process in semiconductor fabrication
1.quartz glass tube for CVD
2. purity 99.99% min
3.OEM is ok
4. No bubbles No airline
5.ISO 9001-2000
Advantage of the quartz glass tube:
1. High temperature resistant, 1100 degree.
2. Corrosion-resistant
3. Good thermal stability
4. Good transparency for light
5. Good electrical insulation
-To order, please reply us your special enquiry.
AL | Fe | K | Na | Li | Ca | Mg | Cu | Mn | Cr | B | Ti |
| 5-12 | 0.19-1.5 | 0.71-1.6 | 0.12-1.76 | 0.38-0.76 | 0.17-1.23 | 0.05-0.5 | 0.05 | 0.05 | <0.05 | <0.1 | <1.0 |
Spectral transmission at 1.0mm thickness
m m | <220 | 255 | 280 | 315 | 350 | 38 | 590 | 780 |
| % | 89 | 91 | 93 | 93 | 93 | 93 | 93.2 | 93.4 |
Physical Proerties
(g/cc)Density20 °C kg.m-3 | 2.2 |
| Degree of Hardness Moh's Scale | 5.5-5.6 |
| Softening point(degree) | 1683 |
| Annealing point | 1215 |